Laser mirror

专利摘要:
The invention relates to a strong, highly reflective and corrosion-resistant structure of a laser mirror layer and can be used in flat recording devices. The aim of the invention is to increase the service life by preventing the coarse crystalline structure of the adhesion metal layer B from reflecting the reflective metal layer. For this purpose, in a four-layer coating deposited on a metal substrate 1, intermediate 3 and protective 5 layers are made of amorphous alumina with a thickness of 50-500 nm and 30-300 nm, respectively, and adhesive layer 2 is made of titanium or chromium with a thickness of 10-200 nm. The amorphous intermediate layer-3, acting as a diffusion barrier, prevents the formation of a reflective surface roughness. All layers of the mirror are obtained | {s by sequential application or evaporation in one vacuum process. 1 il. CO with IsD Oi ls5 About IvD S
公开号:SU1326202A3
申请号:SU823432352
申请日:1982-02-25
公开日:1987-07-23
发明作者:Греваль Вириндер；Райндль Вернер
申请人:Сименс Аг (Фирма)；
IPC主号:

专利说明:

The invention touches the strongly interlocking highly reflective and corrosion-resistant structure of a layer of multilayer laser mirrors of aluminum or brass alloys, which can be used, for example, for flat recording recorders.
The aim of the invention is to extend the service life by pre /: (removing the display of the coarse crisstap structure of the adhesive metal layer in the reflective metal layer.
The drawing shows a laser mirror5 general view
The proposed laser mirror consists of a metal substrate i, adhesion 2, amorphous interlayer, puncture 3 ;; I reflect; 1 (its 4 and protected 3 layers.
The adhesive layer is made of titanium or chromium, and the adhesion;) 1 :: ny and reflective layers as an diffuse barrier, an intermediate layer of amorphous aluminum oxide is provided ;; .
Bde layers are made by successive paping or using in one vacuum process.
A year ago, an amorphous direct layer acting as a di Lu: - ionic barrier is prevented from reflecting on the otr; a coarse layer over time of the structure of the adhesion layer (the effect of emission) and the formation of roughness of the junction surface j yxy; i, is the stitching reflectivity of the mirror as a whole.
Example, Make a laser polygonal four-layer mirror with eight reflective, they plane Compiled I.Ostaschenko Editor N.Egorova Tehred V.Kadar Corrector H, King
Order 3131/59 Circulation 521Subscription
VNIVDI USSR State Committee
for inventions and discoveries 113035, Moscow, Zh-35, Raushsk nab., 4/5
Production and printing company, Uzhgorod, Proektna St., 4
0
five
0
mi and the following. Layer performance: an adhesive layer of titanium 100 them thick; amorphous alumina intermediate layer - 100 nm; reflective layer (aluminum) - 500 nm; protective layer of alumina - 100 nm.
All eight reflective surfaces have a high uniformity of the layers.
The mirror made in this way during storage at a relative humidity of 90% at 40 ° C, as well as at temperature storage at 120 ° C showed no signs of corrosion.
The initial reflection of the proposed mirror, after the deposition of the layers of the ko4x) layer, was preserved after such storage.
F o rmu l invention
A laser mirror containing a substrate containing a four-layer coating consisting of consecutively arranged: adhesive metal, intermediate, reflective metallic and protective layers, which have In order to increase the service life by preventing the coarse crystalline structure of the adhesive metal layer in the reflective metal layer from being displayed, the intermediate and protective layers are made of amorphous alumina 50-500 nm thick and 30-300 nm corresponding to Occasionally, the adhesive layer is made of titanium or chromium with a thickness of 10-200 nm, and the thickness of the reflective metal layer is 100-1000 nm.

权利要求:
Claims (1)
[1]
LASER MIRROR
The invention relates to a strongly adherent, highly reflective and corrosion-resistant structure of a layer of a laser mirror and can be used in flat-panel recording devices. The aim of the invention is to increase the service life by preventing the coarse crystal structure of the adhesive metal layer from being displayed in the reflective metal layer. For this, in a four-layer coating deposited on a metal substrate 1, the intermediate 3 and protective 5 layers are made of amorphous alumina with a thickness of 50-500 nm and 30-300 nm, respectively, and the adhesive layer 2 of titanium or chromium with a thickness of 10200 nm. The amorphous intermediate layer Z, acting as a diffusion barrier, prevents the formation of roughness of the reflecting surface. All layers of the mirror are obtained by sequential sputtering or evaporation in one vacuum process. 1 ill.
Slh „, 1326202
The invention relates to a strongly adhered highly reflective and corrosion-resistant layer structure of multilayer laser mirrors made of aluminum or brass alloys, which can be used, for example, for flat-panel recording devices.
The aim of the invention is to increase the service life by preventing the coarse crystal structure of the adhesive metal layer from being displayed in the reflective metal layer.

类似技术:

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同族专利:

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公开号 | 公开日

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EP0059260B1|1985-06-05|

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DE3170884D1|1985-07-11|

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DE3107612A1|1982-09-16|

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AU8092982A|1982-09-02|

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US4482209A|1984-11-13|

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EP0059260A1|1982-09-08|

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JPS57157204A|1982-09-28|

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AU545173B2|1985-07-04|

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CA1178466A|1984-11-27|

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AT13727T|1985-06-15|

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法律状态:

优先权:

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申请号 | 申请日 | 专利标题

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DE19813107612|DE3107612A1|1981-02-27|1981-02-27|LASER MIRROR, ESPECIALLY LASER POLYGON MIRROR|

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